Used GASONICS / NOVELLUS VHP #293756858 for sale

Name: GASONICS / NOVELLUS VHP
Brand: GASONICS / NOVELLUS
SKU: 293756858
Availability: InStock

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Rapid Thermal Processors

Manufacturer

GASONICS / NOVELLUS

Model

VHP

ID: 293756858

Wafer Size: 4"-8"

Thermal processing system, 4"-8" Gases: O2, Steam oxidation, N2, NO Pressure: 1-25 ATM Temperature: 600-1100°C.