Used MATTSON AST 2800 #293811095 for sale

MATTSON AST 2800 is a state-of-the-art rapid thermal processor designed for the efficient thermal processing of wafers. It is capable of accurately and precisely controlling temperatures in an evacuated chamber to quickly process wafers and reduce the time spent for production. This combination of precision and speed is possible because of its advanced in-situ self-sensing technology, which is able to accurately measure temperatures and times in real time. MATTSON 2800 is also advantageous in terms of cost and space efficiency, requiring less floor space than other comparable tools and generating operational cost savings while maintaining the highest level of quality. AST2800 comes with a comprehensive package of features, including stackable processing of up to 128 wafers, high temperature (up to 700°C) and fast thermal ramps (up to 150°C/sec), a choice of gases ranging from hydrogen to Silane, low system pressure (< 1 mb), and a range of process recipes, all of which can be modified for customer applications. The temperature uniformity steps are also very precise, achieving ≥ +/- 3°C accuracy with a soak time of < 3 minutes. In terms of safety, MATTSON AST2800 utilizes HEPA/ULPA filtration to ensure particle free environments, and is designed to meet Class 1 clean room requirements. 2800 also has a self-locking drawer to contain the processed materials while maintaining a temperature stability, as well as emergency power storage, an over temperature monitor, and an interlock system that will turn off the power if an abnormal condition is detected. Overall, AST 2800 is an ideal tool for modern production, providing efficient, precise, and safe thermal processing. With its advanced and customizable features, it is able to meet a wide range of customer needs while maintaining process quality and cost efficiency.