Used MATTSON AST 2800 #293820853 for sale

MATTSON AST 2800
ID: 293820853
Vintage: 2000
Rapid thermal processor Process: Rapid Thermal Processing (RTP) 2000 vintage.
MATTSON AST 2800 Rapid Thermal Processor (RTP) is a semiconductor device processing equipment designed for high-throughput wafer processing. The system provides a range of thermal treatments with accurate temperature control, and is capable of performing temperature ramp rates from 0.5 to 15 oC/s. The unit's thermal processing chamber can be configured with up to 12 temperature zones, each with adjustable gas flows and temperature ranges, allowing for precise execution of thermal treatments. The unit is designed to provide precise thermal treatments in rapid cycles for a variety of applications. The machine's rapid heating and cooling processes make it ideal for producing ultra-precise temperature ramps from the top to the bottom of the wafer. It is also designed to reduce total thermal treatment time while providing precise and consistent thermal treatment conditions, enabling process optimization and significant cost savings. In addition, MATTSON 2800 is designed for safe operation, with safety features such as automatic protection shutdown in the event of excessive oxide buildup, leakage of process gases, and inadequate thermal profiles. The tool is also equipped with numerous control systems to help ensure continual quality control. AST2800 is a versatile processing asset suitable for a variety of semiconductor applications, including memory chip manufacturing, ultra-Shallow Junction formation, thin-film deposition, and etching processes. The flexibility of the RTP model allows users to customize the equipment configuration according to their application needs. AST 2800 is also compatible with MATTSON VISATM Automation Software, which enables automated wafer handling, data acquisition, and process logging. This provides users with flexibility in their RTP operation, allowing them to create and save recipes, as well as to monitor and control system parameters in real-time. Users are also able to import and export recipes for future use, and the software can be tailored to individual lab conditions. In summary, 2800 Rapid Thermal Processor is a versatile, high-performance unit suitable for multiple semiconductor applications. It is equipped with advanced safety features, precise temperature control, and automated software, providing users with a reliable, effective, and cost-efficient solution for rapid thermal processing of wafers.
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