Used MATTSON AST 3000 #293667076 for sale
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ID: 293667076
Wafer Size: 12"
Vintage: 1999
Rapid Thermal Processing (RTP) system, 12"
RORZE RR711L1521-3A3-E11-1 Robot included
Missing parts:
Relay
Fuse
O2 Sensor
P/N: 2D6-0769-020 (3) Support pins
ID Reader
Sequencer
P/N: CURT-0661-2 X-track driver
Door controller
FCD Board
P/N: 2D6-0582-000 (2) Rotation Lasers
MCU
DC Power supply for 71A1
Power supply
1999 vintage.
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