Used MATTSON AST 3000 #293815931 for sale

MATTSON AST 3000
ID: 293815931
Rapid Thermal Processing (RTP) system (2) Axiom chambers (3) Load / Unloaders.
MATTSON AST 3000 is a rapid thermal processor (RTP) designed for optimal thermal processing of semiconductor and nanotechnology materials. This advanced RTP is particularly well-suited for thermal processes requiring high temperatures in short times. The low thermal mass of MATTSON AST3000 makes it ideal for advanced process testing and production needs. AST 3000 is based on MATTSON patented Anomalous Sub-Threshold heating technology. This, along with refinements in the temperature control algorithm, allows the AST to rapidly and accurately define the thermal profile of the sample. The thermal head of AST3000 is composed of a series of high-precision thermal sensors and electronics. These replace the conventional prism/rod thermal head, allowing temperatures to be accessed in a range of 0.1-3500ºC within seconds. In addition, MATTSON AST 3000 features a near-zero heating time during cooldown processes, offering high thermal stability, even during the most demanding processing requirements. MATTSON AST3000 has an intuitive user interface, providing easy-to-read arrays that show temperatures, times, and processes in a graphical format. Through simple selections, users can quickly set up the thermal parameters and heat/cool controls to monitor the process. The system also provides advanced features such as temperature stabilization, batch programming, fractional control, stress compensation, on-the-fly control, and customizable heating and cooling profiles. Conventional processes are also supported with features such as zone control, local optimization, and error protection. All data is stored on a USB memory key, and can be interfaced with any type of PC or data logger. In addition to its rapid thermal control features, AST 3000 is also advanced in terms of safety. Its high-precision temperature control algorithm and dedicated safety system provide superior protection against any accidental overheating or processing. AST3000 is an ideal choice for demanding process requirements such as phosphorous diffusion, volatilization and source/drain implantation, and advanced thermal treatments for nanofabrication. This outstanding thermal processor delivers superior performance, reliability, and safety, making it an ideal choice for difficult and demanding processing needs.
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