Used MATTSON AST 3000 #293816538 for sale

MATTSON AST 3000 is a Rapid Thermal Processor (RTP) designed for highly accurate thermal processing of semiconductor substrates. This third-generation RTP includes features that enable end users to achieve precise temperature ramping, excellent temperature uniformity, and extended run time in growth and annealing recipes, making it an ideal choice for low- and high-volume production or for difficult process development tasks. MATTSON AST3000 features a large, heated zone that accommodates 400mm wafers, as well as a 300mm zone with an additional guard ring for increased temperature uniformity. The system is integrated with Keco technology, a GaAs technology package and digital control that provides a precise accuracy and repeatability of temperature control, as well as flexibility for running difficult recipes with complex thermal processes. AST 3000's fully-enclosed vertical design ensures consistent total internal reflections (TIR) and eliminates common run-to-run variations associated with open platform systems. Additionally, an optional gas delivery system enables the run of multiple gas stages throughout process recipes. The system also provides a high-precision validation package for pre- and post-process temperature characterization and monitoring. AST3000 is configured with both static and dynamic mechanical vacuum chucking. The static vacuum holds the substrate firmly in place for precise thermal transfer, while the dynamic vacuum ensures positional accuracy of the substrate during mechanical displacement. MATTSON AST 3000 also features a proprietary Fast Internal Dose Management (FIDM) algorithm, which enables precise control of rapid temperature ramps and a unique Short Period Stop and Go (SPSG) algorithm for superior stability and repeatability. MATTSON AST3000 is designed to significantly improve thermal processing efficiency and accuracy while allowing for significant product turn-around times. This helps operators reduce costs throughout the production process and improves overall process repeatability.