Used MATTSON AST 3000 #9281772 for sale

MATTSON AST 3000 is a high-performance rapid thermal processor, manufactured by MATTSON Technology, Inc. It is a versatile equipment designed for both low and high throughput thermal processing of semiconductor wafers. MATTSON AST3000 is capable of processing up to 200 wafers per hour and provides precise thermal control for wafer dies, substrates and other objects with process temperatures ranging from -100 to 1200°C. The system is capable of processing up to 15 individual wafer lots simultaneously. It utilizes a high-speed SCAR ( Selective Zone Atmosphere Retention) principle for the processing chamber, which enables rapid thermal process cycles with minimal gas exchange. AST 3000 utilizes MATTSON proprietary PROCESSWARE software for process control, monitoring and data export. It includes features such as multi-recipe execution, computer-controlled data acquisition and real-time monitoring. It is also equipped with an automatic temperature control unit for improved accuracy and repeatability. The machine's large touchscreen display offers an intuitive user interface for easy control. AST3000 provides extremely accurate and repeatable thermal control, making it ideal for production runs requiring precise temperature control, repeatability and cycle times. Its high thermal throughput and accuracy, combined with its intuitive user interface and robust design, make it an excellent choice for manufacturers looking for reliable and long-term thermal processing.