Used MATTSON AST 3000 #9359569 for sale

MATTSON AST 3000
ID: 9359569
Rapid thermal processing (RTP) system.
MATTSON AST 3000 is a compact, high-performance rapid thermal processor developed by MATTSON to address the demand for advanced technology in the production of advanced semiconductor devices. With its efficient thermal processing technology and high processing accuracy, MATTSON AST3000 is capable of delivering thermal annealing and drive-in cycles at faster rates than traditional systems. AST 3000 includes a number of advantageous features that deliver increased performance and accuracy. It incorporates a multiple-ring furnace design that permits independent thermal control of each individual ring, allowing for a wide variety of available drive-in and annealing cycles. A programmable plasma source allows for an increased range of gas compositions for use in more complex processes. Additionally, it has a high-precision temperature controller, and its ultra-short annealing times reduce the risk of thermal damage to delicate devices. AST3000 also offers high throughput and advanced analysis capabilities. The temperature-sensing sensor unit and the built-in quartz windows enable high-precision analysis of in-process parameters, allowing for more consistent process control. The multiple-zone technology allows for the selection of different processing zones, allowing for greater processing flexibility. MATTSON AST 3000 is designed for use in the production of advanced and high-precision semiconductor components. Its high-performance thermal processing capacities make it ideal for applications such as 3D device preparation, process optimization, fast device aging evaluations, and rapid thermal processing of advanced and delicate semiconductor devices. This automated rapid thermal processor is user-friendly and easy to set up, and its innovative design means that it can be optimized for each application and specific requirements. Furthermore, MATTSON AST3000 offers excellent energy efficiency and robust thermal control, making it an effective and cost-efficient means of producing high-precision and high-performance semiconductor components.
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