Used MATTSON AST 3000 #9390654 for sale

MATTSON AST 3000
ID: 9390654
Rapid thermal processing (RTP) systems.
MATTSON AST 3000 is a revolutionary rapid thermal processor (RTP) designed to provide superior throughput and cost reductions for semiconductor processing operations. Featuring advanced technology and an advanced automation equipment, MATTSON AST3000 is an ideal tool for advanced application steps, such as annealing, diffusion, deposition and processing of thin-film layers, as well as plasma etching and cleaning, and single and dual wafer processing. AST 3000's design is based off of the modular "Platform 3000" architecture, which allows for additions and upgrades without the need for a complete system rebuild. AST3000 is highly configurable and provides a wide range of features, from a Digital PCR Unit to Enhanced Temperature Control. It is capable of a wide range of temperatures, from 50°C to 500°C, making it suitable for a variety of thermal applications. This advanced thermal design also allows for faster ramp-up and cool-down rates. MATTSON AST 3000 is equipped with a variety of safety features, such as over-temperature protection mechanisms, as well as a dual-mode, temperature-regulated wafer lift mechanism. An optional evacuable Load Lock is available, which allows for faster thermal cycling and enhanced process control. In addition, the platform supports advanced software packages used to monitor process parameters and individual machine performance. MATTSON AST3000 is equipped with an advanced automation machine, consolidating tasks across multiple systems and reducing manual labor in production. Throughput can be increased up to 5X compared to traditional manual processes. Overall, AST 3000 is an advanced tool that can be used to achieve greater throughput and cost efficiency in semiconductor processing operations. It offers the optimal combination of performance, features, and affordability.
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