Used MATTSON Hel-A4906 #9384683 for sale

MATTSON Hel-A4906 is a Rapid Thermal Processor (RTP) that provides precise heating, cooling, and uniformity over semiconductor wafers. The equipment provides precise temperature profiles for rapid process development and characterization. It is a computer-controlled device based on Standard Thermal Chassis (STC) technology, allowing the setup and monitoring of each process stage in real-time. Hel-A4906 is equipped with an inert environment to enable contamination-free processes. The RTP has two-zone operation and can adjust temperatures from 20 - 800°C. Two temperature settings, two process pressure settings, and a wide temperature ramping range enable precise and reproducible thermal processes for all application types. The RTP is also equipped with advanced microgravity technology, which aims to reduce thermal non-uniformities on the surface of the semiconductor applications and allows for improved uniformity. MATTSON Hel-A4906 also features a superior class vacuum system, enabling accurate process control for medium to low pressure processes, ranging from 0.00100 - 760 Torr. The vacuum unit includes a multi-stage diffusion and turbo pump for the highest possible evacuation rate. An optional extra vacuum machine can be incorporated into the tool to provide ultra-high vacuum processing. The RTP asset is designed to be compatible with a wide range of quality control tools: the instrument can be integrated with optical microscope systems, in-situ scanning electron microscopes (SEM), and X-ray spectrometers. It also features gas supply, mass flow controllers, and embedded communication protocol for external applications. The model allows the integration of several custom-defined resources, such as pumps, manifolds, valves, and helium leak detectors. Furthermore, the equipment features a host of safety features, such as independent over-temperature protection and an auto-shutdown system that operates if a safety critical fault is detected. Copper blocks are utilized for sample stabilization and thermal uniformity. The unit also allows for the integration of an additional RF source. Overall, Hel-A4906 is an industry-leading RTP machine that provides precise control of heating and cooling profiles to support fast and uniform processes. Its integrated quality control tools and advanced features ensure reliable process performance and reproducibility.