Used MATTSON HELIOS #293665736 for sale

MATTSON Helios is a rapid thermal processor (RTP) designed to perform a wide range of thermal processes on a variety of substrates and materials. Helios features an innovative design that enables it to heat materials up to 900°C in a few seconds or minutes. It is sensitively engineered and constructed with rigorous tight process control and uniformity across the entire area of the wafer surface. MATTSON Helios utilizes PECVD (Plasma Enhanced Chemical Vapor Deposition) and excimer laser annealing technologies in order to achieve the fastest heating rates possible without compromising on uniformity and process control. This allows the tool to treat different substrates and materials with precise temperature and time intervals while minimizing the thermal budget. Helios also features a high temperature range heater to perform annealing at temperatures up to 950ºC, dual 5kW low-noise, high-density plasma sources and the capability of operating in either batch or inline RTP mode. MATTSON Helios offers its users an innovative, fast and reliable process tool to precisely control temperature and time in a wide range of thermal processes. Its robust design, tight control and uniform heating allows for accurate annealing of different materials resulting in quality products. Its fast heating capabilities, high temperature range heater and multiple plasma sources provide the user with the ability to control parameters with a high degree of accuracy. This makes Helios the perfect choice for those looking for a reliable, high performance RTP with excellent process control.