Used MATTSON Helios #293821467 for sale

MATTSON HELIOS is a rapid thermal processor (RTP), specifically developed for process applications in the semiconductor industry. It is a low pressure, high temperature system which is designed to heat and cool quickly and accurately, allowing users to uniformly process wafers. The primary applications of HELIOS include rapid thermal annealing, activation, diffusion, oxidation, and nitridation of semiconductor materials. The system is equipped with a rapid-response high-temperature process chamber, temperature control, RTP monitor, and supporting utilities. MATTSON HELIOS is a 6 inch, 100mm angle-elevation rapid thermal processor. It is designed to rapidly heat and cool wafers with uniformity by using two distinct heating methods. The first is a direct line-of-sight heating source, which provides direct heating to the wafers from the heating elements. The second is an indirect line-of-sight method, which incorporates a line-of-sight window into the system, which allows the energy to pass through and heat or cool as needed. This provides an even more uniform heating or cooling across the surface of the wafer. HELIOS also incorporates several features for accurate temperature monitoring. These features include a real-time temperature readout display, a thermal time-of-flight probe, and a user-selectable thermal diffusivity parameter for precise temperature control. The time-of-flight probe measures the time it takes for the energy emitted from the heating elements to reach the wafer, which can be used to calculate the optimum temperature for the desired process. MATTSON HELIOS also has several features that provide users with highly accurate and repeatable results. These features include a temperature cycler, a tilt timer, and a micro-contamination monitor. The temperature cycler provides a convenient way for users to cycle through the process for improved accuracy and repeatability. The tilt timer automatically adjusts the tilt angle of the RTP according to the holding time required for any given process. Finally, the micro-contamination monitor enables accurate detection of contaminates during the process. Additionally, HELIOS is designed with safety measures to keep all personnel working near the unit safe. This includes a glass chamber, which automatically shuts the unit down when exposure to the chamber is detected. It also includes fire suppression systems and an automatic shutoff if microwaves are over-emitted. In conclusion, MATTSON HELIOS is a versatile and reliable rapid thermal processor which provides uniform heating and cooling for a wide variety of semiconductor processes. It features an ergonomic design, ensures safety for personnel, and provides precise temperature control for accurate and repeatable results.