Used MATTSON HELIOS #9382889 for sale

MATTSON HELIOS is a rapid thermal processor developed and manufactured by MATTSON Technology, Inc. It is a large-scale system designed for a wide range of advanced metallization and wafer fabrication tasks. This versatile and powerful machine is extensively used in the manufacture of integrated circuits, micro-electronics and nanodevices. The processor utilizes advanced rapid thermal processing technology to achieve high throughput. It offers unparalleled accuracy, repeatability and stability during simultaneous processing stages. The system includes a large chamber that can accommodate 550 mm or 200 mm wafers. It also features a distinctively designed, dual-zone processing architecture, reducing the time required to complete each metallization and substrate fabrication task. HELIOS utilizes an automated process controller (APC), equipped with a powerful design suite and user-friendly interface. This enables users to create and save recipes, tweak parameters and easily monitor production steps in a short time. The processor is designed to use a gas mixture of oxygen, nitrogen and other elements for rapid thermal processing. For added convenience, it also features a built-in vacuuming apparatus, significantly reducing gas consumption. The processor is modular in nature, allowing users to integrate other modules depending on specific application. This versatile machine is suitable for a variety of processes such as chemical mechanical polishing (CMP), spin-on wafer fabrication, electroplating, diffusion, oxidation, nitridation and wafer testing. MATTSON HELIOS also supports a host of additional options, allowing users to customize the system for specific needs. Overall, HELIOS is a powerful and versatile rapid thermal processor designed to meet the different needs of advanced metallization and wafer fabrication tasks. It offers excellent accuracy, productivity and flexibility, enabling high speed and cost-effective processing.