Used MATTSON HELIOS #9389809 for sale

MATTSON HELIOS is a rapid thermal processor (RTP) designed for state-of-the-art wafer processing. It offers an extraordinary range of production speeds and temperature profiles. Through state-of-the-art electronics, it is possible to effectively monitor and control the multiple temperature zones of a single wafer. HELIOS is the most advanced RTP tool available on the market, designed to meet the demanding requirements of advanced device integration technologies. Its main features include: a fast ramp rate capability of up to 2000C/minute; high temperature capability of up to 1050C; ultra-low duty cycle; and multiple tube stations, allowing simultaneous processes on multiple wafers. MATTSON HELIOS utilizes advanced diagnostics and control systems, ensuring a high level of reliability and repeatability in the processes that it runs. Its electronic monitoring system ensures precise process control. The dual NDIR gas flow systems provide for highest-purity process gas delivery and effectively minimize contamination levels. Additionally, the processor utilizes special high purity ceramic heat sources for the highest quality annealing operations. HELIOS is built with a robust physical structure and sturdy heat shielding to ensure a high power density and a minimum of thermal thermal diffusion, which is essential for precision thermal processing operations. Its sophisticated process control software optimizes thermal cycling for efficient and fully automated multi-station processes. MATTSON HELIOS provides excellent performance to enhance the yield of integrated circuits and MEMS systems. This processor is widely used in a wide range of applications such as packaging, advanced wafer thinning, and MEMS and photonics manufacturing. HELIOS is a powerful, reliable, and cost-efficient device ideal for precision thermal processing.