Used MATTSON HELIOS #9390687 for sale
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MATTSON HELIOS is a rapid thermal processor (RTP) designed to deliver rapid annealing and low temperature reflow processes to MEMS devices and other ICs. Utilizing rapid thermal annealing (RTA) technology, HELIOS is capable of providing continuous thermal control with the highest accuracy in a small and robust package. It is designed to deliver thermal processes with temperatures up to 1200 °C and a cycle time as short as 4 seconds. MATTSON HELIOS provides a very high level of process repeatability and accuracy, with the potential to give process variables such as temperature and time within +/- 0.5%. Uniformity of thermal profiles is also maximized, with standard processes achieving temperature uniformity of +/- 2°C. This repeatability and uniformity is difficult to achieve with other RTPs and makes HELIOS an ideal tool for many process applications. MATTSON HELIOS features an integrated, computer-controlled system that allows the user to customize and control the entire thermal process. The on-board computer includes an easy to use graphical interface, providing quick access to all the process options, while providing safety features that protect the users and equipment. The system also includes user-defined recipes, a process monitor and data collection, sample databases, and process logging to support advanced process control. The robustness of HELIOS also provides high reliability in even the most challenging operating environments. The system is designed for operation in harsh environments, and is shock and vibration tested as per MIL-STD-810F. The vacuum tight construction also provides excellent thermal insulation and mechanical stability, thus making MATTSON HELIOS a trusted process solution for measuring and testing small devices. Overall, HELIOS provides a robust and reliable solution for research and small production lines. The thermal accuracy, repeatability and uniformity features also make it a perfect choice for MEMs and other ICs applications. With its high-speed process automation and advanced user interface, MATTSON HELIOS is the ideal rapid thermal processor for many applications.
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