Used MATTSON Millios #293647674 for sale
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ID: 293647674
Vintage: 2008
Flash Rapid Thermal Processor (FRTP)
EFEM
MPSU Module
Service module
Process module
SCCT Rack
VFD Module
Power vaccine
Top side control
Storage rack
Voltage box
Accessories
2008 vintage.
MATTSON Millios is a rapid thermal processor used for the rapid heating, cooling, and processing of semiconductor wafers and substrates. It is capable of reaching temperatures up to 1200°C in under 0.5 milli-seconds providing the capability to perform temperature cycles on a wide range of materials and their epi-layers. It makes use of a MOSFET based heating system which allows for rapid ramp-up/ramp-down rates as well as precise temperature control (±1°C). Millios is used in a variety of applications such as Oxidation and nitridation, oxidation emulations, tenosening and annealing, metal layer alignment and burn-in, and other manufacturing processes. MATTSON Millios is designed with a number of innovations which provide decreased thermal excursion and lower edge temperature gradients, as well as reduced induced stresses and improved oxidation profiles. These features help to refine the thermal process and create superior materials which are well suited for the varying needs of modern microelectronics. The machine is outfitted with a controlled atmosphere chamber providing a safe atmospheric environment for even further temperature control. The chamber can be pressurized/depressurized for vacuum or inert gas atmosphere baths as needed. Additionally, the machine includes a state of the art cooling system offering superior cooling capabilities and maximum cooling response time. Millios offers an advanced integrated user-interface based on new, easy to use and configurable graphically assisted support. This helps operators quickly and simply set up their desired thermal process for the best results. As a thermal processor, MATTSON Millios is extremely reliable and is backed by an unparalleled maintenance and service network. They carry complete spare parts kits, allowing for quick and easy replacements with minimal downtime. Overall, Millios is a sophisticated and innovative rapid thermal processor, packed with features designed to give users superior performance while offering complete flexibility and precision. It is designed to provide accurate, repeatable and yields by offering precise, reliable heating and cooling capabilities. This direct heating/cooling system coupled with its advanced integrated user interface and comprehensive maintenance feature ensures that MATTSON Millios will continue to provide reliable and safe operation for many years to come.
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