Used MATTSON Millios #9359557 for sale

MATTSON Millios is a rapid thermal processor (RTP) designed for a range of operations in the Semiconductor and LED industry. It uses advanced thermal technologies to provide enhanced process precision, repeatability and uniformity. This equipment is capable of providing up to six zone temperature control and can perform a range of operations including diffusion, oxidation, and thermal annealing. The system is equipped with a Nitrogen purge to help reduce oxidation and preform processes such as annealing and boron implantation on wafers. It can accommodate wafers up to 300 mm in diameter and can provide temperatures from -50 degrees Celsius to up to 1300 degrees Celsius. The unit also includes a unique grid-arm design that helps in uniform heating and cooling of the wafers. This provides precise and accurate temperature profiling. Millios is also equipped with a real-time process monitoring machine, which provides further precision and repeatability to the wafer processing. Additionally, it has an integrated automated loading and unloading module that streamlines the loading/unloading process and provides safer and faster wafer transfer. Furthermore, this tool offers a variety of options to improve the overall user experience. This includes a recipe manager asset, allowing users to store and recall processing recipes and manage different recipes with minimal effort. It also has an online manual, which provides detailed instructions for setting up, operating and troubleshooting common issues. This model is suitable for a range of markets including LED manufacturing, MEMS and other advanced semiconductor applications. It offers improved safety features through an interlock equipment that prevents operation when an error condition occurs. It also increases process control by displaying actual wafer location during processing. Overall, MATTSON Millios RTP is a highly sophisticated and reliable wafering system that offers precise, repeatable and uniform thermal treatments. It offers a range of features and benefits for the user, particularly in processes that require high precision and uniformity. Additionally, it significantly reduces waste while increasing process efficiency, making it an ideal choice for a variety of industries.