Used MODULAR PROCESS TECHNOLOGY / MPTC RTP-600 #9392903 for sale

MODULAR PROCESS TECHNOLOGY / MPTC RTP-600
ID: 9392903
Wafer Size: 5"
Rapid Thermal Processing (RTP) system, 5".
MODULAR PROCESS TECHNOLOGY / MPTC RTP-600 is a rapid thermal processor (RTP) designed to precisely and rapidly process optoelectronic and other device components, such as Infrared Leds, Photodiodes, Photonic crystals, Nano-structures and it has been developed for wafer or chip scale processing and selectively heating with a resolution of a few um, typically 1-3 um, periodic structures and elements. MPTC RTP-600 is designed to perform various rapid thermal processes (RTP) such as rapid annealing, refining, and recrystallization. MODULAR PROCESS TECHNOLOGY RTP-600 can be used for rapid thermal processing at temperatures up to 1100°C. Its core components consist of an electrically heated chamber, an air or helium circulator fan, a temperature controller, and an RTU (Rapid Thermal Unit). The cooling equipment consists of a thermoelectric cooler, an air blower, and a circulating pump. RTP-600 has a temperature range of 0 to 1100°C, is controlled by an advanced process controller featuring a programmable high-temperature ramp/soak cycle, and proprietary user-defined oxidation, diffusion, and annealing profiles. The frequency of the temperature ramp can reach up to 5000 degrees per minute. It can also accommodate multiple orientation wafers and many substrates such as glass, ceramic, and metal. MODULAR PROCESS TECHNOLOGY / MPTC RTP-600 is easy to use, requires minimal set up and installation, and is capable of cleaning and providing process control for all of the critical device parameters while keeping low thermal budget and power dissipation. MPTC RTP-600 utilizes an advanced temperature controller that is capable of regulating temperature and maintaining it within a few degrees. MODULAR PROCESS TECHNOLOGY RTP-600 comes with a wide variety of test modules with varying test conditions to study the properties of device materials such as thermal conductivity, reflectivity, and emission characteristics, among others. The system also supports multiple device configurations and package types. RTP-600 is an ideal solution for process demands and allows higher throughput for industrial production. It has been extensively tested and certified by leading device manufacturers and process labs and can guarantee repeatable and accurate results. With features like a self-diagnostics unit, ease of operation, and user-friendly software, this machine is the perfect solution for device packaging and testing needs.
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