Used MODULAR PROCESS TECHNOLOGY / MPTC RTP-600S #9241026 for sale

MPTC/MPT MODULAR PROCESS TECHNOLOGY / MPTC RTP-600S is a rapid thermal processor designed for high-efficiency thermal annealing processes. MPTC RTP-600S is equipped with a single high-speed capillary that can provide an ultra-fast annealing process. MODULAR PROCESS TECHNOLOGY RTP-600S heats the semiconductor substrate or wafer from the bottom of the process chamber with two quartz lamp arrays and achieves rapid thermal annealing (RTA) temperatures within seconds. RTP-600S utilizes a linear heating mechanism that provides uniform heating and cooling along the wafer surface. MODULAR PROCESS TECHNOLOGY / MPTC RTP-600S allows for unparalleled process control and accuracy due to its patented "radial deep hot spot" design which allows precise adjustment of the thermal annealing profile. MPTC RTP-600S provides excellent process flexibility in order to meet the needs of a variety of substrates and application requirements. This process also supports a variety of wafers including silicon, silicon carbide and gallium arsenide. Additionally, the wafer size and shape can also be customized depending on the application requirements. The linear heating block design is mated to a compact wafer carrier which allows for easy and reliable wafer loading and unloading. MODULAR PROCESS TECHNOLOGY RTP-600S controllers are able to handle multiple process requests and provide excellent control over the process parameters such as temperature and time. RTP-600S is also integrated with an integrated cooling fan that keeps the warm spot temperature low. This integrated fan and the use of air-cooled heaters help to reduce thermal cycling time and decrease thermal distortion. MODULAR PROCESS TECHNOLOGY / MPTC RTP-600S process chamber is vacuum sealed, allowing near hermetic seals to be created to prevent gas and moisture infiltration and keep moisture away from the wafers during processing. The process also includes on-board gas delivery and exhaust system to allow for controlled amounts of process gas to be added to the process chamber. MPTC RTP-600S is designed for maximum reliability and robustness and can perform over 500 repeatable thermal cycles without the need for precision alignment or special process setup. Additionally, MODULAR PROCESS TECHNOLOGY RTP-600S follows safety guidelines and is certified with multiple safety protocols.