Used NEWYOUNG RTA-150H-SP1 #9134152 for sale

ID: 9134152
Vintage: 2002
Rapid thermal annealer, 2002 vintage.
NEWYOUNG RTA-150H-SP1 is a rapid thermal processor that is capable of delivering accurate, reliable and repeatable thermal cycles for a wide range of wafer sizes. It is designed to meet the requirements of all semiconductor manufacturing processes, including wafer dicing, wafer fabrication, and wafer-level assembly. It is a comprehensive thermal processing solution that is ideal for high-volume and advanced applications, such as the production of high power or low power devices. RTA-150H-SP1 has a multi-zone temperature control equipment with each zone temperature being rapidly controllable, enabling uniform and repeatable results. The processor is equipped with a dual-zone feeder system for manual or automatic wafer sorting before thermal processing. This unit allows for precise timing and zone control during wafer loading and unloading, ensuring accuracy and repeatability. With the dual-zone feeder machine, the machine can automatically select the optimal thermal cycle based on wafer size. The machine also includes a five-sensor protection tool that prevents overheating or undercooling of wafers, ensuring optimal temperature accuracy and repeatability. NEWYOUNG RTA-150H-SP1 has a process chamber volume of 300 liters and a process pressure range of 1-10 Torr. It offers an adjustable, variable-temperature-range process window of 20-250°C, with optional up to 700°C. The programmable ramp-rate range is 30-600°C/second and includes dynamic temperature limiters and hysterisis for enhanced temperature repeatability. The customizable process controller stores up to 10 programs with total process parameters of up to 500 steps. The machine has an optional remote io-Link control asset that allows for process monitoring and data logging of temperatures, pressures, and gas flows from outside the process chamber. Overall, RTA-150H-SP1 is a reliable and robust thermal processing solution that offers accuracy as well as flexibility for a wide range of parameters. Its separate dual-zone feeder model ensures reliability and repeatability for wafer-level processing, while the advanced, five-sensor protection equipment ensures optimal temperature accuracy and repeatability. With its adjustable, variable-temperature-range process window and customizable process controller, this processor is a great option for various applications, including the production of high power or low power devices.
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