Used PREMTEK RTP 381 SA #9312338 for sale

PREMTEK RTP 381 SA is an advanced rapid thermal processor designed to deliver superior performance with optimized cycle time. RTP 381 SA utilizes a proprietary closed-loop thermal control system and advanced power regulation capabilities to provide precise thermal stability and achieve a high thermal transfer rate. The device can process wafers up to 200mm in diameter and up to 25mm in height. It is designed to provide repeatable, reliable thermal control to achieve high-accuracy thermal processing. The system utilizes low nitrogen pressure annealing (LNPA) and has programmable heating and cooling profiles. It has a temperature range of up to 1300°C and can reach peak power levels up to 1500 watts during ramp-up and cool-down cycles. The continuous flow shower plates allows for uniform temperature distribution across the surface of the wafer, leading to improved process uniformity. Additionally, the device has an integrated dual-arm air displacement unit to provide uniform heat flux at varying positions across the wafer surface. PREMTEK RTP 381 SA can be applied to a variety of substrate materials such as silicon, gallium arsenide, and other semiconductor materials. The device has advanced safety controls to reduce the possibility of accidental over-tempering or dangerous meltdowns. Additionally, RTP 381 SA utilizes active force sensors to provide real-time monitoring of the wafer temperature, including thermal runaway protection. PREMTEK RTP 381 SA has a variety of feature sets to improve efficiency and provide an optimized process cycle. These features include programmable memory modes, multi-level temperature history logging, high resolution temperature labeling, shift pattern and spot pattern temperature correction, and reticle pattern temperature correction. Furthermore, the device can be further customized to suit specific process needs to deliver the highest performance without compromising on accuracy.