Used SSI Solaris 150 #9268077 for sale

SSI Solaris 150 is a rapid thermal processor that is designed for diverse research and industrial applications. It provides excellent and uniform wafer heating over a wide temperature range of -150°C to 1000°C with a fast ramp rate. It offers a compact design and a precise robotic wafer handling equipment, which enables it to support a variety of wafer sizes (2", 3", 4", 5", and 6") and be quickly reconfigured for single wafer or batch operations. Solaris 150 is designed with advanced PID-controlled wafer heating using a solid-state lamp coupling system for uniform and repeatable thermal processing. It can achieve a high-temperature ramp rate in excess of 20°C/sec, and it also has an integrated optical pyrometer that helps to accurately measure the wafer temperature. The built-in Windows-based software provides complete process control flexibility with programmable recipe options. SSI Solaris 150 has a customizable control architecture that allows for fast calibration and recipe development. It has a high-definition digital color display with intuitive touch screen controls, so users can quickly and easily monitor and configure the unit. This RTP machine also has flexible communication architecture which can be connected via Ethernet or PC, allowing remote monitoring and control of the process. Solaris 150 is designed to perform various processes such as annealing, nitridation, oxidation, diffusion, recrystallization, metal deposition, and depassivation to meet the stringent quality requirements of Photonics, MEMS, RF, and microelectronics applications. It's low cost, small footprint, and high uniformity make it ideal for research labs, universities, and small-scale production facilities. For superior performance and reliability, SSI Solaris 150 has advanced safety features, including a protective metal shroud and a safety interlock that prevents wafer transfer in case of power failure. It also has an advanced purification tool that helps to improve the quality of the processed wafer and also helps to reduce the possibility of contamination.