Used STEAG / MATTSON / AST 100 #9190168 for sale

ID: 9190168
Wafer Size: 6"
Rapid Thermal Processor (RTP) system, 6" Chamber.
STEAG / MATTSON / AST 100 rapid thermal processor is an advanced thermal processing equipment designed for a variety of research and industrial applications. It provides rapid thermal processing and direct heat transfer between sample and the substrate by using a single stage, single chamber approach. The system uses a resistive heating element, and its unique architecture provides a wide range of thermal and process parameters. This allows the unit to meet the requirements of a variety of thermal processing applications. The machine uses a high-temperature, low thermal conductivity quartz chamber to create a thermally isolated environment. Thermal stability and low thermal mass are the two most important features of this design. The chamber ensures that the sample is heated uniformly, while its low mass and high thermal conductivity ensure quick temperature response. The chamber also allows for rapid heating and cooling cycles, making it suitable for rapid thermal processing and annealing applications. The tool includes a development computer, a quartz furnace, a resistive heating element, temperature, pressure, and flow sensors, and a control asset. It is equipped with a PID control loop for temperature control, as well as additional control features such as a process timer, pressure control, and a process monitor. The model is also capable of controlling an additional sample load. The equipment is capable of providing precise temperature control and heating profiles, even at extreme temperatures. It is capable of processing a variety of substrates such as metals, polymers, and semiconductor materials. It can also be used for RTP and rapid annealing, as well as a wide range of other rapid thermal processing applications. AST 100 is an ideal system for advanced thermal processing applications. Its single-stage, single-chamber architecture provides excellent process control and thermal stability at extreme temperatures. Its unique design also allows for precise temperature control and heating profiles, making it suitable for a variety of processing applications.
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