Used STEAG / MATTSON / AST 2800 Epsilon #9139817 for sale
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ID: 9139817
Wafer Size: 8"
Vintage: 2002
RTP System, 8"
System power: 43kw,208V, 60Hz
Software version: Windows NT4.0 SHS 1.42
Front door type: Auto
Chamber door type: Cylinder type
Carrier stage rotation: Rotation
Monitor front / rear: 2EA
Gem interface
4-Color signal tower
UPS System
(2) Gas inlet: Bottom
Stage assign Cool stage Dummy stage Process stage
Total: 5EA 2 1 2
Gas system Model Gas Name Scale
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MFC5
IPC Module: Booting check
ILC Module:
Power Supply check
PWM Board 1,2 Check
POD Board check
INT Board check
MIB Board check
SEC Board check
EPC486 Hard drive check
Control rack 1:
EOCU(ECCU) Board check
BLCU Board check
MCU Board check
Power supply check (1~4)
Control rack 2:
LCCU Board check
LCL 1,2 Board check
SMB Board Check
SLSU Board 1,2 check
LVU Board check
LCU Board X2 check
WCU Board U check
TCA Module check
Control rack 3:
PCU Board check
PDCU Board check
PIO Board check
PDU Board check
PSU Board check
PVC Board check
PVU Module check
WVU Board check
DVU Module check
Robot:
Controller check
Moving check
Aligner:
Controller check
Align check
O2 Analyzer:
Display unit check
Sensor unit check
Pyrometer check
Terminal box check
Lamp: Fail check (1 ~ 38 )
2002 vintage.
STEAG / MATTSON / AST 2800 Epsilon is a Rapid Thermal Processor (RTP) used by the semiconductor and electronic industries for efficient throughput of device processing. By utilizing the state-of-the-art hot and cold processing capabilities, AST 2800 Epsilon is able to provide sophisticated thermal treatment of device structures and substrates. It achieves high-quality results while minimizing time and cost. STEAG 2800 Epsilon is equipped with two independent thermal process chambers, each capable of reaching temperatures of up to 1100°C. Each chamber is also equipped with the latest substrate heating, cooling, and thermal cycling capabilities. This allows a wide variety of thermal profiles to be achieved. 2800 Epsilon's accuracy and precision is ensured through advanced temperature control systems and feedback probes. Temperature readings are provided at the chamber's top, bottom, and sides while the process executes, eliminating potential uneven heating. A variety of vessel types can be used in MATTSON 2800 Epsilon's process chambers. This includes quartz, aluminum, ceramic, and glass vessels. Alignment pins within the chambers prevent vessels from rotating while the process is in progress. Both chambers' process fluid can be filtered to protect the vessel walls from impurities. This is done with a variety of filters, such as metallic filters, film filters, and membrane filters, which can be installed in-situ. STEAG / MATTSON / AST 2800 Epsilon's heating and cooling systems are designed to deliver fast, uniform thermal processing. With the help of high-performance controllers, both chambers can independently control their temperatures and timing with extreme accuracy. This at-the-same-time design saves time and energy, allowing for faster, more efficient thermal treatments. AST 2800 Epsilon also provides the flexibility of remote monitoring and operation via the integrated digital control systems, which offer various system data logs, critical error alerts, and other features. It also offers an advanced user interface for ease of use. Overall, STEAG 2800 Epsilon is an advanced RTP, capable of providing uniform, rapid, and precise thermal treatments of a wide variety of substrates and device structures. Through its powerful controllers, fast thermal cycles, and easy user interface, it offers an energy-efficient and cost-effective solution for device processing.
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