Used STEAG / MATTSON / AST 2800 Epsilon #9195879 for sale

STEAG / MATTSON / AST 2800 Epsilon is an advanced thermal processor designed for high-throughput operation. It is a compact, self-contained instrument with a single unit platform featuring a hot-wall furnace, wafer transfer robot, and controller. Ideal for both research and production requirements, this rapid thermal processor utilizes precise temperature control to ensure consistent results. AST 2800 Epsilon features a hot-wall design with 24 high energy quartz lamps. Intended for rapid thermal annealing, this unit provides an even distribution of heat across the wafer to enhance the deposition uniformity. The lamps are placed in a gated configuration to allow for higher temperatures and more consistent uniformity. STEAG 2800 Epsilon can reach temperatures up to 600 degrees Celsius and maintain temperature control accuracy to within 1°C. The wafer transfer robot included in MATTSON 2800 Epsilon is capable of handling 20mm x 150mm wafer sizes with a maximum load capacity of 50g. This robot ensures reliable and accurate handling of wafers, even at high speeds, for smoother and faster sample processing. Additionally, 2800 Epsilon also features an advanced temperature and vacuum control system, designed to minimize thermal non-uniformity. The advanced controller of STEAG / MATTSON / AST 2800 Epsilon allows users to store up to 20 recipes with all of the essential parameters. This includes cycle time, profile set points, cooling rate, and other crucial process parameters. The user friendly graphic touch screen enables simple and intuitive operation. AST 2800 Epsilon is the ideal solution for rapid thermal processing of wafers. With its precision heating capabilities, automated wafer transfer, and intuitive controller, this rapid thermal processor is designed for maximum efficiency and accuracy.