Used STEAG / MATTSON / AST 2800 #101676 for sale
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ID: 101676
Wafer Size: 8"
RTP system, 8"
Front side:
Monitor - Front LCD
Cassette station: 2 station
Rotation disabled
Cassette Size : 8"
Cooling Station
Dummy Station, not original but modified
Pre Aligner
Robot
Endeffector, not original but modified
Slot Sensor, missing
Keyboard-Front
Floppy Disc
Signal Tower: 4 colors
EMO switch
Door Plate
Back side:
EOCU
BLCU
Control Rack 1 Power Supply 1
Power Supply2
Power Supply3
Power Supply4, missing
MCU
LCCU
LCL1
LCL2
Control Rack 2, SLCU1, missing
SLCU2, missing
LVU, missing
LCU1, missing
LCU2, missing
WCU1, missing
WCU2, missing
O2 Display
TCA
PCU
PDCU
PIO
PDU
PSU
Control Rack 3, PVU1
PVU2
SMB
PVC, missing
DVU
WVU, missing
ILC Rack controller:
Power Supply
PWM1
PWM2
ILC POD
INT (= STATUS)
MIB
SEC
EPC 486
Gas box:
N2 30 SLPM
O2 10 SLPM, O2 100 sccm
MFC & Gas Filter, NH3 10SLPM, Missing
Ar 10 SLPM, Missing
Temperature:
Pyrometer
Optic sensor
Tube TC
Service console:
Touch Screen - Rear
Keyboard - Rear, Missing
IPC:
Main Computer
Vacuum pump:
Vacuum pump, missing
Sensor:
O2 MFC
Power Supply
Display Meter
O2 Sensor
O2 Pump, missing
Quartzware:
Tube, Missing
Tray, Missing
Pin for tray, Missing
Distribution plate(T), Missing
Distribution plate(R), Missing
Door aperture, Missing
Elbow, Missing
O2 sensor pipe, Missing
Liner plate(Top), Missing
Liner plate(Bot), Missing
Hot Liner , Missing
Edge guard ring, Missing
Pin for cooling station, missing
Other:
UPS, n/a
TC wafer(S-Type), Missing
TC feed through
Can be inspected.
STEAG / MATTSON / AST 2800 is a rapid thermal processor specifically designed for the easy and precise regulation of temperature for thermal processes in analytical and scientific research. This processor has a temperature range from -95°C to 500°C, and its patented air-liquid/-water cooling technology allows temperatures to be regulated quickly and efficiently within that range. This rapid thermal processor works by employing a reaction chamber, which holds a sample, replaced with a spark-proof (STST) container. The temperature of the sample inside the container is regulated directly with a thermoelectric module and then monitored by a precise temperature controller. The processor can also be run in a static or dynamic operation mode. In static operation, the temperature inside the chamber is allowed to stabilize before the desired thermal cycle is started. In dynamic mode, the temperature is ramped up and down over time to achieve the desired result. The processor also uses a powerful vacuum pump that offers rapid and accurate pressure control during the thermal process, as well as an adjustable air curtain around the chamber that helps to reduce temperature variations. And thin film evaporation is made possible using auxiliary heating functions. It has a user-friendly touchscreen panel for entering process parameters and monitoring operation, as well as an interface which allows data to be transferred to PCs. AST 2800 also comes with a variety of safety features. It can automatically shut down if the temperature becomes excessive, and it has an auto start-up feature for when power failure occurs. It also has a unique neutral gas protection system that eliminates the risk of oxidation of samples. Overall, STEAG AST2800 is a powerful, reliable, and incredibly precise rapid thermal processor. Its efficient operation, range of safety functions, ease of use, and data transfer capabilities make it well-suited to any laboratory or research setting.
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