Used STEAG / MATTSON / AST 2800 #293621529 for sale

AST/STEAG / MATTSON / AST 2800 is a high-speed rapid thermal processor that utilizes advanced thermal processing and advanced cooling technology for precise control and processing of advanced microelectronic materials. This technology provides quick thermal ramp rates, precise temperature control, and tight uniformity performance with fast cooling times. AST 2800 is designed for a wide range of high temperature applications such as oxide deposition and etching, diffusion, annealing, photolithography, and testing. This equipment employs a unique X-Y controlled wafer positioning system that allows for accurate thermal processes without external motion during the process cycle. STEAG AST2800 also features four advanced thermal zones and four vertical gas injection cylinders for precise gas delivery during processes. STEAG 2800 utilizes an advanced microprocessing and instrumentation unit to provide reliable, repeatable performance. The microprocessing machine provides high speed and precise thermal control with advanced temperature, ramp, and cycle programming. The instrumentation tool provides precision monitoring and control of temperature, temperature uniformity, SOI (surface of interest) temperature, and gas pressure. MATTSON 2800 is designed to be operated in a Class 10 cleanroom environment. It is designed to ensure accurate and repeatable performance within very tight temperature uniformity tolerances. The asset is also capable of handling a wide range of substrate sizes and is compatible with a variety of wafer handling systems. STEAG / MATTSON / AST AST2800 offers a variety of temperature control methods, including temperature algorithm control. This algorithm is used to compensate for discrepancies in thermal response during time-varying thermal processes. The model also offers a range of temperature regulation methods, including heating, cooling, and intelligent temperature control. 2800 is an advanced thermal processor for advanced microelectronic materials. Its high speed and precise temperature control, coupled with its tailored thermal ramp and cycle programming make it an ideal tool for a variety of high temperature processes.