Used STEAG / MATTSON / AST 2800 #9185557 for sale

STEAG / MATTSON / AST 2800 is a rapid thermal processor (RTP) designed for high-temperature annealing and lithography processes. The equipment utilizes a high power microwave source and a specially designed graphite susceptor to enable fast, localized heating of thin-film materials. The RTP provides uniform temperature profiles in the range of 50-600°C, with a maximum thermal exposure time of as low as 2ms. It is also capable of repeatable temperature profiles across a wide range of small samples of up to 2mm in size. The system utilizes a specially designed application chamber equipped with an ergonomic sample containment unit. This provides an efficient and safe environment for rapid processing, and helps to ensure precise temperature control without the need for sample movement. To further enhance precision, the machine utilizes a series of precise motion control elements and feedback mechanisms. A single-camera CCD imaging tool is available for monitoring sample progress during the thermal processing. The optical asset features a wide field of view (up to 40°) and a large pixel size, allowing high resolution imaging of rapidly changing thermal properties. Additionally, a high dynamic range model allows for temperature mapping of multiple regions. The RTP is compatible with a wide variety of innovative thin-film materials and applications. It is suitable for use with polysilicon, silicon nitride, silicon dioxide, and other materials for high temperature annealing and lithography processes. Additionally, it is well suited for performing rapid transient temperature experiments, which seek to measure the thermal shock of various thin films and rapidly determine the optimal annealing times for various thermal processing techniques. Finally, the RTP has been developed to provide outstanding equipment stability, with a high degree of control accuracy and reproducibility of results. The system also features low power consumption and low noise operation, making it ideal for applications within sensitive laboratory applications.