Used STEAG / MATTSON / AST 2800 #9244813 for sale

STEAG / MATTSON / AST 2800 is a rapid thermal processor, designed to offer a fully automated thermal treatment solution for materials. This processor provides advanced thermal homogenization, oxidation/reduction capabilities, and rapid thermal cycling for a range of semiconductor processes. Its high-speed data collection and reporting systems ensure repeatability of results and improved system control. This rapid thermal processor consists of a GaAs wafer heater, thermoelectric cooler, H-Bridge controller, application control and process monitoring. Using these components, the processor is able to deliver advanced thermal conditioning for single or multiple wafers in both processing and annealing cycles. It offers precise temperature programming, with ranges from -160°C to +850°C. Low thermal gradients across the wafer are achieved through a high-accuracy temperature control during the entire term processing cycle. The processor can accommodate up to nine stacked wafers or substrates in a single run, or multiple runs at 12 different rates and energies. In addition, integrated sensors provide real-time data for monitoring the thermal process, enabling tighter process controls. This data can also be used to update process parameters and create predictive models for optimal process results. The system is equipped with AutoTune software, which helps optimize not only core process parameters, but also heater type, heater power, and heater speed. Additionally, the selective edge heating feature helps in the passivation of heated wafer edges, and thus prevents dielectric integrity issues. The automated system control and monitoring capabilities of AST 2800 make it ideal for rapid thermal processing applications in photovoltaic and LED production. The all-in-one design simplifies setup, operation, and process verification, and ensures repeatable and reliable results. Additionally, this processor can be integrated with existing production lines, providing full integration of temperature sensing and control.