Used STEAG / MATTSON / AST 3000 plus #9281776 for sale

STEAG / MATTSON / AST 3000 plus is a rapid thermal processor (RTP) that utilizes a combination of temperatures ranging from room temperature up to 1500˚C. This technology is used in semiconductor device fabrication as it is capable of heat treatment at predetermined temperatures and time scales. This RTP adopts a modular approach and consists of three component parts that include the Advanced Process Control, the robust thermal chamber, and the efficient convection system. The Advanced Process Control allows for precise temperature programs to be programmed to achieve the desired results. It provides accurate temperature measurements in short sample processing times, minimizes residual stresses in a sample, and allows for reproducible results due to its high thermal accuracy. The robust thermal chamber consists of a large high-performance heating zone, a movable wall ensures uniform thermal processing, and its interconnected parts allow for process control capabilities to be programmed over wide temperature ranges. Finally, the efficient convection system allows for rapid thermal processes to take place at high temperatures without introducing any motion artifacts. AST 3000 plus allows for high rate processing that is extremely precise and consistent. The device's accommodative temperature range allows it to be used for a variety of applications such as wafer deposition/etching, device fabrication, and ALD/CVD processes. The high rate processing and along with the improved thermal system makes this RTP the perfect choice for any organization with a need for precise and repeatable thermal processing. Additionally, this device is capable of sustaining high temperatures for extended periods of time without compromising on operator safety.