Used STEAG / MATTSON / AST 3000 #293615440 for sale
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ID: 293615440
Rapid Thermal Processor (RTP), 8"-12"
(2) FOUPs
(3) Cassettes, 8"
(2) Combined and integrated SMIF, 8"-12"
(3) Side panels
(3) Upper quartz plates
(2) Linear plates
(8) Gas distributors
(4) Air bearings
(2) Roter, 12"
Ring carrier, 8"
Rotor plate, 8"
Rotor, 8"
Ring deflection frame
Chamber
U, Q, P Static with ring tilt
Blower: 0.93 m²
Pyro chiller
SIEMENS DC Power supply, 24 V
Process module
Power control module: 1.04 m²
Computer electronics
Footprint, 4.19 m²
Rack
Da-Karte
HDD
CPU
MUX-DAC-DSP
PyRi-PCC
Netzteil 2x15V
Netzteil 5V
Netzteil ±12V/5V
Netzteilter
C64-Busplatine
ISA 36 Bus 3 Slot
Wafer handler module:
I/O Controller
Distribution box
Gas cabinet:
Pressure: 6 Bars
Purity N2: >99.9999%
Purity O2: >99.9999%
Gas / Flow rate:
O2 / Ar / 50 SLM
NH3 / 30 SLM
H2 / -
O2 / 5 SLM
O2 / 60 SLM
N2O / 30 SLM
N2 / 100 SLM
Missing parts:
Robot
Aligner
Pyrometer
Control
Oxygen sensor
PCU Parts
PWM / POD boards.
STEAG / MATTSON / AST 3000 is a rapid thermal processor that offers the highest level of performance for a precise and precise thermal management process. This processor is designed for high-accuracy, high-speed thermal processing to meet the needs of a variety of applications. It has a large range of features, including multiple temperature zones, high-resolution heat flow monitoring, and precise temperature control. The processor can be controlled in both manual and automatic modes to suit any application. The temperature zones can be programmed according to the needs of the application with precise temperature control, ensuring that the correct temperature is maintained throughout the thermal process. The processor also has a high-resolution heat flow monitoring system, allowing precise control of the heat flow within the system. The processor also has a robust design, allowing it to work in harsh environments. It can work with a variety of materials, including metals and plastics, providing precise thermal processing in these materials. The processor also has an optimized heat transfer system and a large cooling capacity, ensuring that the material is processed at the appropriate temperature. AST 3000 provides a high level of accuracy and precision in a variety of thermal processes. The processor is also cost-effective, providing an ideal solution for a wide range of applications. The processor can be used for a variety of processes, including thermal treatment of metals, plastics, and semiconductor devices. The processor is also ideal for the processing of material in the manufacturing of products, ensuring that the highest levels of accuracy are maintained. STEAG 3000 is an excellent choice for a range of applications requiring precise and accurate thermal processing. The processor is designed to provide a precise and accurate thermal management process, allowing the highest level of performance in various applications. The processor is also cost-effective, providing an ideal solution for a wide range of applications.
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