Used STEAG / MATTSON / AST 3000 #293814736 for sale

STEAG / MATTSON / AST 3000 is a rapid thermal processor designed specifically for production-level semiconductor device manufacturing. It is engineered to reduce cycle time as much as possible while preserving the quality of the processed devices. AST 3000 utilizes a pre-conditioning chamber that is designed to quickly and precisely heat and cool the required amount of substrate material in order to meet high throughput requirements without compromising performance. The machine is capable of heating the substrate to temperatures up to 1250C in order to properly stimulate the reactions necessary for device creation. STEAG 3000 employs a high-temperature environment to minimize device damage caused by long cycle times. This is done by utilizing a multi-segment thermal program to continuously fine-tune the thermal profile to the exact temperature required for the process. The temperature controller also prevents deposition or oxidation of the substrate caused by thermal overkill. 3000 utilizes a dual RF power source with fast switching between the two frequencies for maximum thermal uniformity. MATTSON 3000 also features a built-in process monitoring system which continually checks the status of each substrate to ensure the highest possible throughput. This includes continuous monitoring of the substrate temperature, gas flow and pressure during the entire process. High precision metrology tools are also included in this system to ensure the desired process outcomes are being met. STEAG / MATTSON / AST 3000 comes with a selection of user-programmable options that allow process recipes to be transferred easily between different machines. This makes multiple process recipes possible and helps ensure process repeatability across multiple machines. Additionally, AST 3000 can be equipped with a variety of edge isolation options, including isolation with nitrogen, helium, and chlorine, which are designed to ensure high production yields. Overall, STEAG 3000 is a powerful, reliable, and efficient rapid thermal processor that is perfect for production-level semiconductor device manufacturing. It offers an easy-to-use user interface as well as customizable process recipes for top-notch performance and output. Its many features, including temperature control and process monitoring, make it a great choice for busy semiconductor manufacturers.