Used STEAG / MATTSON / AST 3000 #9095994 for sale
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ID: 9095994
Wafer Size: 12"
Vintage: 2004
Rapid Thermal Processing (RTP) System, 12"
2004 vintage.
STEAG / MATTSON / AST 3000 is an advanced rapid thermal processor designed to provide reliable processing results in short cycle times. It features a high temperature, high power heating capacity and is capable of heating three 150mm wafer carriers in less than ten seconds to temperatures as high as 1100°C. The use of a large wafer surface area results in an extremely homogenous heating effect while the use of the newest quick "cool down" technology ensures rapid turnaround from process to process. This advanced rapid thermal processor utilizes a three zone; high temperature, medium temperature and low temperature chamber system, which is designed to provide even temperatures and temperatures longevity, further enhancing the reliability and accuracy of the heating functions. Its low drift and low thermal gradients ensure that parts are heated accurately and exactly to the desired temperature. In addition to providing high temperature, high power processing, AST 3000 also provides process monitoring capabilities, ensuring that process temperature and times are controlled to very precise levels. It also features an accurate time-temperature monitor, enabling users to factor in the time-temperature data associated with each process. Furthermore, the device offers the ability to program up to 999 scripts that can be stored for use during pre-programmed processes. The robust design of STEAG 3000 ensures it is highly reliable with low maintenance requirements. Its stainless steel processing chamber is corrosion and abrasion resistant, and the device does not require process flushing or water recirculation. Furthermore, the user-friendly LCD touch screen display allows clear monitoring of the rapid thermal processor's status and settings, and provides a range of functions for quick and easy data entry, manipulation and storage. Furthermore, MATTSON 3000 is equipped with safety-related features such as door interlocks, wafer carrier interlock, over-temperature interlocks, overpressure warning and others. This ensures peace mind to operators that the equipment will remain steady and reliable when performing critical operations. Overall, 3000 is an advanced rapid thermal processor designed to meet the demanding needs of modern industrial production. It combines high temperature, high power heating capacities with process monitoring capabilities, user-friendly LCD touch screen displays, and high reliability and safety-related functions, making it an attractive device for any production environment.
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