Used STEAG / MATTSON / AST 3000 #9095995 for sale

STEAG / MATTSON / AST 3000 is a rapid thermal processor (RTP) equipment for treatment of semiconductor wafers. This versatile system is designed to provide highly uniform temperature control and precisely engineered thermal processes for successful ion implantation and a wide range of other semiconductor and optoelectronic applications. The unit is ideal for use in the development of baselines processes for production and guarantees a precise temperature environment for rapid thermal annealing (RTA) as well as furnace annealing of heavily doped silicon materials. The machine offers high-speed heating and cooling capability over a wide range of temperatures. The use of a rotating susceptor ensures uniform distribution of heat within a sample. It is capable of maintaining temperatures up to 1150°C. Temperature uniformity is maintained at +/- 2°C and is measured on the top, middle, and bottom surfaces of a wafer. The tool also features real-time monitoring and control to ensure rapid response times. Overall, AST 3000 provides a comprehensive thermal processing capability for production and development processes. It features a sturdy chamber construction designed to ensure ease of maintenance, as well as reliable electronics for precise temperature control. Its compatibility with various environments and process recipes make the asset attractive to research laboratories and processing centers alike. The model is further made stand-out by its patented software algorithms that provide advanced temperature compensation and maintain uniformity and accuracy over the entire wafer. STEAG 3000 comes with a limited 3-year warranty and includes a remote computer interface and graphical user interface (GUI). This allows for complete integration with factory automation systems and the ability to access the equipment locally and remotely. The RTP is also equipped with diagnostics and fault management features, making it easy to detect, diagnose, and carry out corrective measures when needed. All in all, MATTSON 3000 is an advanced rapid thermal processor for a wide range of semiconductor and optoelectronic applications. Its robust design, precise temperature control, real-time monitoring and control, and compatibility with various environments make it an attractive option for production and development processes.