Used STEAG / MATTSON / AST 3000 #9224637 for sale

STEAG / MATTSON / AST 3000 is a Rapid Thermal Processor (RTP) used for processing semiconductor wafers with high repeatability and precision. This advanced system is designed to manufacturer high quality and reliable integrated circuits (ICs) and is well-suited for processing even the most highlycomplex devices. This RTP is comprised of several major components including the heating chamber, temperature controller, loading and unloading station, protective enclosure, wafer transfer robot, and wafer chuck. The primary heating chamber of AST 3000 is constructed from stainless steel for superior thermal stability and uniform temperature distribution. Its temperature range is from -70°C to 1000°C with a heating and cooling rate of up to 200°C/second. The RTP is enclosed in its own protective cabinet to ensure the safety of operation and maintenance personnel. The temperature controller is programmed to accurately regulate the chamber temperature profile and run multiple ramp temperatures at a single run. The processor is easy to operate and intuitive, with an LED display and full QWERTY keyboard for input commands. The controller also comes equipped with cooling and process gas flow sensors for precise and reliable performance. In addition to the heating and cooling elements, STEAG 3000 also features a robotic arm for wafer loading and unloading. This arm is programmed to move the wafers from the storage tray to the wafer chuck, and vice versa. The wafer chuck is specially designed to ensure secure wafer handling, providing support and alignment during the rapid thermal process. For extra protection, the wafers are further secured with a ventilated lid that also functions as a humidity and particle barrier. MATTSON 3000 is an advanced RTP system that is designed for maximum efficiency and reliability. Its robust construction ensures uniform heating, cooling, and wafer handling, making it an ideal choice for those seeking high quality IC manufacturing.