Used STEAG / MATTSON / AST 3000 #9262640 for sale
URL successfully copied!
Tap to zoom
ID: 9262640
Wafer Size: 8"
Vintage: 2002
Rapid Thermal Processor (RTP), 8"
(2) ASYST SMIF
RORZE Dual arm robot
Gases: O2, NH3, N2
2002 vintage.
STEAG / MATTSON / AST 3000 is a rapid thermal processor (RTP) designed for high-performance applications. It is an advanced thermal processing system that uses a combination of infrared lamps and hot gases to quickly raise and lower the temperature of substrates or other materials. With AST 3000, users can achieve a wide range of temperatures in a fraction of the time demanded by traditional methods. STEAG 3000 was designed with a unique configuration of two chambers: a Cold Zone chamber and a Hot Zone chamber. The Cold Zone chamber, located in the upper half of the device, is an active area for heating and cooling. The chamber is equipped with IR lamps for direct heating, a gas flow system, which can be programmed for various gas mixtures, and cryogenic storage for cryogenic cooling. The Hot Zone chamber, located in the lower half of the device, is for annealing and heat-treating substrates. The Hot Zone chamber hosts a curtain-like radiation shield and heating elements along with an array of heat-resistant optical windows. 3000's software includes user-friendly graphical controls which allow for the clear visualization of thermal processes. The software enables efficient and repeatable programming of temperature profiles and control parameters. MATTSON 3000 is also equipped with a real-time temperature monitoring system which allows for a comprehensive characterization and optimization of process parameters. STEAG / MATTSON / AST 3000 is a reliable tool for rapid thermal processing. It is capable of processing materials in a fraction of the time demanded by traditional methods and it is designed to allow for precise and repeatable control of heating and cooling rates. This advanced tool provides a fast and reliable way to process wafers and other substrates with extreme temperature variations.
There are no reviews yet