Used STEAG / MATTSON / AST AST 2900 #9266541 for sale

STEAG / MATTSON / AST AST 2900 is a high-performance rapid thermal processor (RTP) designed for advanced processing of semiconductor wafers. It is capable of providing superior thermal and speed performance in applications such as epitaxial growth, dopant activation, and annealing. AST 2900 can provide unsurpassed temperature control accuracy and repeatability so that processing is highly reliable and repeatable. It is a horizontally mounted equipment equipped with a unique guarded heater design that ensures even and uniform heating over the entire wafer diameter. STEAG AST2900 is capable of heating rates up to 5°C/second, as well as cooling rates up to 30°C/second while maintaining excellent thermal regulation. STEAG 2900 features a gas delivery system, with a rapid exchange manifold and mass flow controllers, allowing customers to use a variety of gases for various processes. To ensure safety during operation, STEAG / MATTSON / AST 2900 has a ground fault interrupter and two-stage safety valve control systems with automatic shutoff. MATTSON AST2900 is also equipped with a state-of-the-art computer control unit that provides users with the ability to customize temperature profiles and setpoints, as well as monitor the machine and verify the operating conditions. AST AST 2900 is an advanced rapid thermal processor that offers excellent temperature accuracy and repeatability. It features fast heating and cooling rates, precise gas delivery, and a robust safety tool. Thanks to its computer control asset, users have the flexibility to customize parameters to accommodate advanced processes. MATTSON AST 2900 is an ideal choice for semiconductor processing and advanced applications such as epitaxial growth, dopant activation, and annealing.