Used STEAG / MATTSON / AST Atoms #9229578 for sale

STEAG / MATTSON / AST Atoms is a rapid thermal processor (RTP) used in the semiconductor industry for processes such as thin-film deposition, oxidation, annealing and metal sputter deposition. The equipment utilizes a range of specialized temperature controlling technologies to rapidly achieve desired temperatures with excellent uniformity. The system is equipped with a Quartz Vertical Tube Furnace (QVTF) and upward or downward gas flow capabilities, both of which help ensure uniform and accurate temperature control across the region of interest. The QVTF is a vertical quartz tube and its unique design facilitates efficient heating and treatment of the wafer or other substrate. The vertical tube furnace is mounted on a low thermal mass energy platform providing excellent temperature uniformity and rapid temperature change rates. An air forced convection (AFC) module is also included in the unit. The AFC module combines airflow and limited gas flow to provide the desired heating of the substrate. This enhances temperature uniformity within the process when compared to traditional systems as turbulent air currents are created around the substrate during treatment. The control and monitoring of the temperature in the machine is done via a series of advanced components including a high power amplifier, a microprocessor, a thermocouple, a temperature sensor, and an advanced software program. These components offer excellent precision when controlling the temperature. AST Atoms offers a variety of temperature profiles including single zone treatment, up to eight controlled zones, and up to 200 configurations. The possibility to run different treatment programs simultaneously on one platform makes this tool ideal for multiple processing needs. Additionally, the asset provides excellent thermal uniformity, and the precision temperature control of STEAG Atoms makes it one of the best performing RTP systems available.