Used STEAG / MATTSON / AST Atoms #9353268 for sale

A STEAG / MATTSON / AST Atoms is a rapid thermal processor that uses a revolutionary, advanced, ultra-pure, high-temperature annealing process to deliver effective and consistent thermal processing for improved performance. It is constructed with a high-precision, digitally controlled heating equipment to deliver precise temperature cycling over an unprecedented range of temperatures. The rapid thermal processor has a wide range of features and capabilities, including superior stability, adjustable process time, two independent temperature control loops, and an advanced backside wafer temperature measurement system. AST Atoms processor uses a digitally-controlled contactless resistance heating unit to rapidly heat the surface of a silicon wafer to a desired temperature in less than nine seconds. The machine works by using cables to create eddy currents in the wafer, which is then further heated using an induction heating tool. These two methods working in tandem achieve the required temperature rapidly and consistently. STEAG Atoms processor has two separate temperature control loops that work in parallel to ensure effective and optimal temperature control of the wafer during thermal processing. The first loop is a proportional-integral-derivative controller and the second is an auto-tune controller that enables smoother control of the set point. This ensures that the wafer is rapidly and uniformly heated to a consistently-controlled temperature without the need for manual adjustment or intervention. Atoms processor also uses an advanced backside wafer temperature measurement asset through a wafer tail clamp model. This is designed to rapidly measure the temperature of the wafer during thermal processing, helping to ensure accuracy and consistency. The backside wafer temperature measurement equipment is also designed to be incredibly fast and accurate, even at temperatures exceeding 400° C. MATTSON Atoms rapid thermal processor is an amazing tool that enables manufacturers to produce incredibly precise and consistent components through rapid thermal processing. With its powerful combination of features, superior stability, adjustable process time, dual temperature control loops, and advanced wafer temperature measurement system, STEAG / MATTSON / AST Atoms processor is a powerful tool that stands out in both speed and performance.