Used STEAG / MATTSON / AST CS 100 #293729355 for sale
URL successfully copied!
Tap to zoom
ID: 293729355
Rapid Thermal Annealing (RTA) system
No vacuum system
Material used: Gas
Gas configuration: N2.
STEAG / MATTSON / AST CS 100 is a cutting-edge rapid thermal processor commonly used in the semiconductor industry for advanced processing technologies. This innovative tool is designed to deliver precise thermal treatment to semiconductor wafers, enabling critical processes such as annealing, oxidation, and diffusion with high efficiency and accuracy. AST CS 100 is part of the leading-edge AST series of rapid thermal processing systems developed by STEAG, a renowned provider of equipment for semiconductor manufacturing. At the core of STEAG CS 100 rapid thermal processor is its advanced heating technology, which allows for rapid and uniform heating of semiconductor wafers up to high temperatures. The equipment is equipped with advanced temperature control mechanisms, including multiple heating zones and precise thermal sensors, to ensure tight temperature control and uniformity across the wafer surface. This level of control is essential for achieving the desired process outcomes and maintaining the quality and reliability of the fabricated semiconductor devices. MATTSON CS 100 features a sophisticated gas delivery system that enables precise control of the process atmosphere during thermal treatment. This allows for the introduction of gases such as oxygen, nitrogen, and process gases into the processing chamber, facilitating specific thermal processes such as oxidation, nitridation, and annealing. The unit is also equipped with a robust vacuum machine to create a clean and controlled environment conducive to high-temperature processing of semiconductor wafers. One of the key advantages of CS 100 rapid thermal processor is its flexibility and scalability, allowing semiconductor manufacturers to adapt the tool to a wide range of process requirements. The asset is capable of handling various wafer sizes, including standard 150 mm and 200 mm wafers, as well as custom substrates. Additionally, STEAG / MATTSON / AST CS 100 can accommodate different process recipes and thermal profiles, making it suitable for a diverse range of applications in the semiconductor industry. AST CS 100 rapid thermal processor is designed with a user-friendly interface and software control model, enabling operators to easily program and monitor the thermal processing parameters. The equipment offers advanced process control features, including real-time temperature monitoring, thermal ramping, and data logging capabilities, allowing for precise process optimization and troubleshooting. The intuitive software interface also provides visualization tools for analyzing process data and optimizing process recipes for enhanced productivity and yield. In conclusion, STEAG CS 100 rapid thermal processor is a state-of-the-art tool that offers semiconductor manufacturers unmatched precision, flexibility, and control in thermal processing applications. With its advanced heating technology, precise temperature control, gas delivery system, and user-friendly interface, MATTSON CS 100 is a reliable and versatile solution for critical process steps in semiconductor fabrication. By leveraging the capabilities of CS 100 rapid thermal processor, semiconductor manufacturers can achieve superior process performance, yield, and device quality in their production operations.
There are no reviews yet