Used STEAG / MATTSON / AST Helios 6000 #9211048 for sale

STEAG / MATTSON / AST Helios 6000 is a high-performance rapid thermal processor (RTP) that utilizes a unique combination of proven advanced technologies and components. This high-end industrial-grade solution is designed for semiconductor wafer process control engineers and a wide array of applications requiring rapid thermal processing. AST Helios 6000 features an engineered open-cell, center-less susceptor design that allows for faster process cycles and maximum uniformity within a wide workspace. The result is optimal throughput and superior substrate heating. STEAG Helios 6000 also offers advanced thermal control, with direct digital feedback and real-time temperature sampling, resulting in consistent thermal processes with repeatable results. The equipment includes an advanced single-zone automatic level-sensing and leveling system that ensures wafers are consistently held securely in the processing zone, providing superior thermal uniformity. Helios 6000 also includes a high-speed digital I/O subsystem that provides total control of the unit's operations and facilitates communications with a host machine. The advanced digital control and feedback feature allows users to set improved thermal process parameters as well as monitor and control the process from a remote location through a browser-based user interface. MATTSON Helios 6000 features an advanced integrated process control tool with an intuitive operator interface for simplified operation. The asset's built-in recipe and process control functions allow users to store a library of recipes for a variety of different processes and develop their own custom recipes. This provides unlimited scalability and flexibility for automated recipes, among other features. STEAG / MATTSON / AST Helios 6000 also supports process integration with external systems for troubleshooting, reporting, and other requirements. AST Helios 6000 is designed for maximum reliability and process repeatability. It provides a wide workspace capacity up to 8.2" and supports both single-sided and double-sided substrate heating. The model is equipped with an advanced gas/flow regulator to ensure optimal gas/flow distribution within the workspace, while a media baffle assembly helps to evenly distribute media flow and achieve temperature uniformity. Overall, STEAG Helios 6000 is an advanced and reliable rapid thermal processor that offers superior thermal performance and process repeatability. Its robust architecture and unique design offer the ultimate in performance, flexibility, and scalability for a wide array of applications and process control needs.