Used STEAG / MATTSON / AST Helios #9206297 for sale
URL successfully copied!
Tap to zoom
ID: 9206297
Wafer Size: 12"
Vintage: 2005
Rapid thermal processor (RTP) system, 12"
(2) Process chambers
(3) FOUP
Carrier ID reader: Hermos RF CID
SECS / GEM
MBC Soak anneal controller
Low temperature option:
Including low temperature MBC
Fast cooling option: FAC / USJF
Low concentration processing kit
Over pressure control
Gasses:
N2, 20 SLM
N2, 150 SCCM
O2, 150 SCCM
O2, 20 SLM
O2, 2 SLM
Ar, 150 SCCM
Ar, 20 SLM
O2, 200 SCCMO APF Faceplate
2005 vintage.
STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) designed to provide precise thermal processing capabilities. It utilizes a unique design to maximize throughput and increase productivity. AST Helios employs multiple run-time control features, providing accurate temperature control in the chamber. This thermal accuracy is achieved with a variety of thermostatic techniques, including PID (proportional, integral, and derivative), robust core temperature control systems, and independent process area monitoring. This ensures precise control over the temperature of each substrate that passes through the chamber. STEAG Helios also offers incredible speeds, allowing the temperature to rise and fall quickly. This works to increase throughput, as the entire substrate population can be processed in one run. MATTSON Helios can reach temperatures up to 1,300°C in less than 10 seconds. In addition to the fast speed and accurate temperature control that Helios offers, it has a space-saving design. It only requires a smaller footprint for its operation. STEAG / MATTSON / AST Helios can be easily installed and removed, providing a convenient option for industrial and laboratory applications. It is also easy to program, allowing for customized applications to be used. AST Helios also offers a number of safety features, such as an open chamber design, pressure control valves, emergency stop button, and multi-point protection systems. These features protect personnel, equipment, and the environment. With its quick processing times, accuracy, and safety features, STEAG Helios is an ideal choice for any rapid thermal processor system. With its versatile design, fast speeds, and advanced safety features, MATTSON Helios is sure to make thermal processing applications easier and more productive.
There are no reviews yet