Used STEAG / MATTSON / AST Helios #9241199 for sale
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ID: 9241199
Wafer Size: 12"
Vintage: 2006
Rapid Thermal Processor (RTP), 12"
2006 vintage.
STEAG / MATTSON / AST Helios is a rapid thermal processor that is used for both general purpose processing and specialized applications. It has the capability to quickly heat materials to a high temperature in a short period of time while providing an accurate temperature profile. AST Helios utilizes various RF generators and switchgear to quickly heat to and cycle through precise temperatures at either a constant or a programmed rate. The process is monitored using thermocouples and optical emission spectroscopy to ensure that the correct temperature is achieved. To further enhance precision, thermally conductive ceramic mirrors are used to reflect the infrared radiation generated by the RF generators. The precise temperature control combined with high heat flux rate allows STEAG Helios to process materials faster than many other thermal processing methods. This results in shorter cycle times and increased throughput. Additionally, it can be used to carry out Low-Temperature activation annealing, diffusion bonding and diffusion coating among other processes. Helios' modular design allows for custom configurations, enabling its use in a wide range of applications, including semiconductor manufacturing, microelectronics fabrication, and catalytic surface modification. Its control system is also highly customizable, enabling users to program bespoke processing recipes with recipes for different materials. MATTSON Helios is also equipped with additional safety features to ensure the safe operation of the device and its components. These features include over-temperature and over-current safety systems, emergency stop buttons, and high temperature protection systems to shut off the RF generators and switchgear in the event of an over-temperature condition. STEAG / MATTSON / AST Helios is an ideal solution for those requiring high precision and quality processing. Its modular design and customizability make it well suited for a wide range of applications. Moreover, its tight temperature control and high heat flux rates make it one of the most efficient rapid thermal processors available.
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