Used STEAG / MATTSON / AST Helios #9255871 for sale

STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) built to provide a high-temperature heating solution for semiconductor device fabrication. The RTP is capable of rapidly changing the temperature of a substrate, from ambient to a set maximum temperature, in a matter of minutes. It works by using radiation-based heating of the substrate, at a wavelength range that is optimized to efficiently generate the desired temperature. The RTP can also be used for annealing treatments of the substrate, as it is capable of producing a temperature profile over the whole substrate. AST Helios equipment is made of three components: a microwave power generator, microwave antenna and the reaction chamber. The power generator contains the components needed to convert electrical power to microwaves, which are then radiated from the antenna into the reaction chamber. Inside the reaction chamber, there is an array of quartz reflectors that focus the microwaves onto the substrate, which regulates energy absorption by the substrate. The quartz reflectors are arranged in a way that reduces non-uniform energy absorption, providing a uniform temperature profile over the entire substrate. For accurate temperature control, STEAG Helios system is equipped with an automated temperature controller. This automatically adjusts the power of the microwave generator to maintain the desired temperature. This unit also uses a mass flow controller to control the flow of a heated gas for cooling. This allows for quick cooling of the substrate, thus preventing overheating and thermal damage to the device. Helios machine is a highly reliable and efficient rapid thermal processor. It is capable of providing uniform temperature distributions over entire substrates, and is ideal for rapid thermal annealing of electronic devices. Furthermore, its precise temperature control and efficient cooling allow manufacturers to produce high-quality devices in an efficient and cost-effective manner.