Used STEAG / MATTSON / AST Helios #9256880 for sale

STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) designed for sophisticated thermal processing of semiconductor wafers. It utilizes short-pulse microwave, rep-rated laser, or plasma heating to quickly and efficiently perform thermal processes such as rapid thermal annealing (RTA), oxidation and deposition for device manufacturing. Designed for research and development as well as volume production, AST Helios RTP features flexible and reliable temperature control over a wide range of temperatures and provides high repeatability. Based on the planar quartz high intensity lamps technology, STEAG Helios RTP offers ultra-rapid thermal processing using a horizontal metal halide lamp capable of delivering an intense out-of-band spectrum of light for faster processing. It also features a variable angle reflector to direct the light onto the wafer. The adjustment of the reflector angle allows users to match the lamp profile to the wafer position and wafer height for maximum uniformity. MATTSON Helios features an advanced thermal control equipment to ensure precise temperature uniformity across the wafer. The thermal management system comprises an infrared temperature sensor, temperature feedback loops, and fast-acting temperature controllers. For intense thermal processes such as rapid thermal nitridation (RTN), Helios also features temperature overshoot protection to ensure operator safety. Also, process performance is further optimized using a multi-wavelength measurement technique, which continuously monitors two wavelengths using an on-wafer instrument. This ensures precise control of the temperature set-point throughout the entire process. STEAG / MATTSON / AST Helios also features an integrated gas delivery unit for controlling wafer atmosphere. It supports a variety of gases for oxidation, deposition, and annealing processes and can be modified to meet customer requirements. AST Helios also features a wide range of accessories that enable customers to customize their processes. Such accessories include wafer rotation, arm extensions, imaging systems, and temperature and gas monitoring systems, among others. All of these features provide customers with unparalleled flexibility and superior process performance. In conclusion, STEAG Helios is a highly advanced rapid thermal processor designed for high-throughput and precise thermal processing of semiconductor wafers. With its combination of ultrafast heating rates, precise temperature control, and flexible gas delivery machine, MATTSON Helios enables superior process performance for a variety of thermal processes.