Used STEAG / MATTSON / AST Helios #9270883 for sale

STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) that provides high speed, precision temperature control. AST Helios uses a combination of convection, resistive heating, and cooling via radiative cooling to rapidly heat and cool wafers. It features three independently controllable chambers, allowing for faster temperature processing of samples. Using patented nitride heating elements with intelligent microprocessor-controlled logic, STEAG Helios is capable of accurate thermal performance with minimal overshoot and heat CAE time. MATTSON Helios is designed to deliver uniform, repeatable temperature profiles to achieve the high-level precision needed for state-of-the-art device manufacturing. The accuracy and uniformity of the temperature profile are backed by an optically detectable resistive pattern in the emitted radiation. In addition, Helios is capable of precise temperature overshoot control. Programmable via an intuitive software interface, STEAG / MATTSON / AST Helios also offers multiple wave shape selections for heating and cooling cycles to accommodate different device types. AST Helios is designed to offer rapid heat-up and cool-down times to minimize thermal stresses on wafer surfaces. Additionally, STEAG Helios utilizes an internal fan to provide good air circulation and cooling performance. MATTSON Helios features a space-saving design and can be easily installed in tight spaces, making it an ideal choice for both R&D and production environments. Helios' design also makes it relatively low maintenance and allows easy access to the chamber for maintenance. Overall, STEAG / MATTSON / AST Helios is a powerful and compact rapid thermal processor that offers reliable, precision temperature control in a wide range of environments. Ideal for both R&D and production settings, AST Helios guarantees accurate temperature profiles and reduced thermal stresses on wafers, making it an essential tool for precision device manufacturing.