Used STEAG / MATTSON / AST Helios #9270998 for sale

STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) designed to rapidly heat and cool wafer samples in small batches in a single batch. This RTP equipment is made up of four components: a low pressure chamber, a furnace assembly, an electric field modulator, and an atmospheric-pressure change system. The low pressure chamber provides a sealed atmosphere that is temperature-controlled and dry. The furnace assembly enables uniform and rapid heating and cooling of the wafer samples. It consists of multiple heated and cooled heaters that are separated by the sample's backing plates to create a temperature profile. This allows precise temperature control and distribution over the sample. The electric field modulator is used to change the wafer's electrical field across the sample to regulate the electron-hole density ratio. This ensures that an even thermal process is applied to the sample. Lastly, the atmospheric-pressure change unit enables precise control of the chamber pressure so as to accurately control the cooling or heating process. AST Helios is capable of reaching temperatures from 120- 1000 degrees Celsius in less than 2 minutes. With its SmartMonitor software, users have the ability to program multiple processing recipes and loads, as well as monitor the progress of the process directly or remotely. In addition, STEAG Helios features a variety of safety features designed to protect the users and the samples. These include an inert gas fill connection, forced air cooling for the chamber, temperature alarms, and a smoke detection machine. MATTSON Helios RTP tool offers several benefits, such as rapid processing, near-uniformity of sample temperature, enhanced safety, and precise control. This rapid thermal processor can be used in various industries such as semiconductor, materials research, process development, and device manufacturing.