Used STEAG / MATTSON / AST Helios #9273940 for sale

STEAG / MATTSON / AST Helios is an advanced rapid thermal processor engine, designed specifically for the semiconductor industry to provide improved performance. It is capable of delivering high thermal uniformity across wafers and across different temperature plays of a single road map. AST Helios also offers exceptional wafer throughput and high repeatability with tight process margins. STEAG Helios uses a high-powered 2000 W Radiant Heating Source and a Cooling Flush technique to deliver rapid thermal treatment to substrates. It also includes a unique Patented Cold Wall design to eliminate interference effects between the substrate and the process chamber walls. This reduces usage time significantly and allows for much shorter cycle times. Helios has an impressive control system which utilizes a Digital Thermal Control Message Bus (DTM-Bus) and Predictive Thermal Control Messaging (PTM). This allows for precise closed loop control of all vital process parameters and sets a new standard for rapid thermal processing. It is also equipped with a range of sophisticated diagnostics such as an advanced fault management system and advanced process parameter monitoring. MATTSON Helios also has a range of improved safety features such as open system architecture, built-in safety interlocks, and comprehensive emergency stops to ensure maximum safety at all times. Overall, STEAG / MATTSON / AST Helios is an excellent rapid thermal processor that features advanced technologies and cutting edge design. It allows for improved wafer throughput and high repeatability in a cost effective manner and provides a reliable, flexible, and safe solution for RTP, WTL, annealing, oxidation, diffusion, and other SiC process applications.