Used STEAG / MATTSON / AST Helios #9281781 for sale
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ID: 9281781
Wafer Size: 12"
Vintage: 2004
Rapid Thermal Processing (RTP) system, 12"
2004 vintage.
STEAG / MATTSON / AST Helios is an advanced rapid thermal processor (RTP) designed for production and research applications. It is capable of heating samples in a short time up to a temperature of just over 850°C with millisecond accuracy and precision. The device is equipped with a fully automated control equipment which allows for repeatable results with a high degree of uniformity. AST Helios RTP comes with an advanced two-zone heating design, allowing each zone to run independently. This makes it possible to achieve a higher degree of uniformity and precision in the heating process. Each of the two tubes contain a robust graphite insulating matrix and a tungsten filament, allowing for improved thermal properties. For increased reliability, the system is equipped with a sophisticated feedback loop and control unit, allowing for very fast response and precise regulation of temperature. STEAG Helios RTP also features an advanced thermal oxidation machine, allowing for high throughput and low temperature oxidation of materials. This tool is specifically designed for applications that require high rate oxidation processes, such as semiconductor device production. It is also well suited for other processes requiring precision thermal control, including rapid crystal growth and thin film deposition. Helios RTP includes an advanced multi-spectral imaging asset, allowing for precise monitoring and control of the sample temperature and oxidation state. This model can be combined with other software and hardware systems, allowing the user to optimize the thermal process to their specific application. MATTSON Helios RTP is designed for cleanroom applications, providing a very safe environment for running processes. This includes a high level of environmental control, as well as robust protection against harmful electromatic and electrostatic emissions. This also allows for improved control of the thermal process, as well as increased equipment longevity. Overall, STEAG / MATTSON / AST Helios is an advanced and reliable thermal processor. It provides a high degree of performance and accuracy, and is well suited for a variety of high-tech thermal process applications.
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