Used STEAG / MATTSON / AST Helios #9281783 for sale

STEAG / MATTSON / AST Helios is a rapid thermal processor (RTP) used in the manufacturing of integrated circuits. AST Helios is used to quickly raise or lower temperatures on wafers or substrates during the integrated circuit fabrication process. This process is known as thermal processing. STEAG Helios features a micron-precision apex alignment equipment which enables it to quickly achieve the required temperature for each substrate, ensuring precise results. This is important for integrated circuit manufacturing because it ensures that each platform on the substrate achieves the same set point temperature, which is essential for efficient and accurate device fabrication. Helios utilizes a combination of direct gas heating and plasma processing to achieve temperature targets. The direct gas heating system enables MATTSON Helios to transfer over 10,000 watts of thermal energy onto the wafer, allowing it to rapidly reach the set temperature point. The plasma processing enables STEAG / MATTSON / AST Helios to achieve uniform temperatures throughout the entire wafer, which is important when manufacturing and linking integrated circuits. There are 3 main segments to AST Helios: the temperature control unit, the heating chamber, and the gas delivery unit. The temperature control unit monitors and maintains temperature levels, providing a temperature range of 200° C to 1000° C with an accuracy of ± 5.5° C. The heating chamber is used to subject the wafer to the specified thermal energy in order to reach the required temperature levels. The gas delivery machine is used to provide specialty gas to the chamber, such as nitrogen , helium and argon . STEAG Helios also features features a secondary heating tool known as heated blanketing. This asset utilises hot gas that is circulated through the process chamber, providing insulation from outside influences. At the same time, the heated blanketing also helps to reduce the stress and strain that the process chamber experiences during rapid temperature changes. Helios provides integrated circuit manufacturers with a high-precision, efficient thermal processing model that reduces defects and improves process time. This has resulted in high levels of customer satisfaction, making it an important part of any integrated circuit manufacturing facility.